جهت دسترسی به کاربرگه ی زیر، از این لینک استفاده کنید. http://dl.pgu.ac.ir/handle/Hannan/114336
Title: A micromachined angular-acceleration sensor for geophysical applications
Keywords: Science & Technology;Physical Sciences;Physics, Applied;Physics;Applied Physics;Engineering;Physical Sciences
Issue Date: 26-Oct-2016
Publisher: AIP Publishing
place: Science and Technology Facilities Council (STFC)
Description: This paper presents an angular-acceleration sensor that works as either an angular accelerometer or a gravity gradiometer and is based on the micro electromechanical system (MEMS) technology. The changes in the angle of the sensor mass are sensed by a rotational capacitive array transducer that is formed by electrodes on both the stator and rotor dies of the flip-chip-bonded MEMS chip (21 mm × 12.5 mm × 1 mm). The prototype was characterized, demonstrating a fundamental frequency of 27 Hz, a quality factor of 230 in air, and a sensitivity of 6 mV/(rad/s2). The demonstrated noise floor was less than 0.003 rad/s2/Hz−−−√Hz within a bandwidth of 0.1 Hz to 10 Hz, which is comparable with the conventional angular accelerometer and is better than the other reported MEMS sensors in low-frequency ranges. The features of small size and low cost suggest that this MEMS angular-acceleration sensor could be mounted on a drone, a satellite or even a Mars rover, and it is promising to be used for monitoring angular accelerations, aiding seismic recording, mapping gravity anomalies, and other geophysical applications for large-scale terrestrial and space deployments.
URI: http://dl.pgu.ac.ir/handle/Hannan/114336
Other Identifiers: http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000387258300044&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=1ba7043ffcc86c417c072aa74d649202
1077-3118
http://hdl.handle.net/10044/1/43005
https://dx.doi.org/10.1063/1.4966547
ST/L001098/1
Type Of Material: Other
Appears in Collections:Electrical and Electronic Engineering

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