Please use this identifier to cite or link to this item: http://dl.pgu.ac.ir/handle/1853/15696
Title: The use of polyimide for the development of micromachined materials, processes and devices
Keywords: Polyimides;Micromechanics
Issue Date: Dec-1993
Publisher: Georgia Institute of Technology
Description: Ph.D.;Mark G. Allen
URI: https://smartech.gatech.edu/handle/1853/15696
Other Identifiers: 376105
Type Of Material: OTHER
Appears in Collections:College of Engineering (CoE)

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